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Surface Element Analysis Device - List of Manufacturers, Suppliers, Companies and Products

Surface Element Analysis Device Product List

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[Analysis Case] Evaluation of the Fracture Surface of Laminated Samples by AES Analysis

[Analysis Case] Evaluation of the Fracture Surface of Laminated Samples by AES Analysis

Visualizing a 50nm thin film with a cross-sectional sample.

AES analysis is a method for obtaining compositional information from the surface to a depth of several nanometers. By performing AES measurements on the cross-section of a sample to obtain elemental distribution images, it is possible to clearly evaluate the layered structure. In addition to evaluating layered structures and conducting elemental analysis of the inner walls of trenches and holes, combining mechanical processing and ion beam processing allows for the assessment of thin alloy layers and phenomena such as diffusion and segregation of elements. In this case, we will present data evaluated using AES analysis for a thin film deposited on a silicon substrate.

  • Contract Analysis

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[Analysis Case] Evaluation of Cu Surface Discoloration Using AES and SEM-EDX

[Analysis Case] Evaluation of Cu Surface Discoloration Using AES and SEM-EDX

It is possible to perform elemental analysis with a shallow detection depth while conducting SEM observation.

SEM-EDX analysis and AES analysis are suitable for simple investigations of discoloration and foreign substances on metal surfaces. However, when the discoloration or foreign substances are thin or small, AES analysis, which provides information from very shallow areas of the surface (about 4-5 nm), is effective. The AES equipment owned by MST can acquire SEM images, allowing AES analysis to be conducted while confirming the areas of interest using SEM images. In this case study, we will present data comparing the evaluation of discoloration on the Cu surface using AES analysis and SEM-EDX analysis. Additionally, we will also present the results of AES depth direction analysis.

  • Contract Analysis

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